Thermal process

The Cleanroom at LCN on the Bloomsbury site has 255 square metres of ISO 14644-1 Class 6 (Class 1000) cleanroom housing most of our equipment for Plasma etch, Photolithography, Wet Chemical, Metallisation, Furnace, Characterisation and Electron Beam Lithography processes.

The SSI Inc Solaris 150 Rapid Thermal Processing System (RTP) is a proven, “state of the art” versatile tool for Silicide formation, metal Alloys Group III Nitrides Reflow: BPSG, PSG contact anneal, Ferroelectrics, Implant anneal, HBT & MESFET Solar Cells, Implant monitoring Thermal donor, Si