The Cleanroom at LCN on the Bloomsbury site has 255 square metres of ISO 14644-1 Class 6 (Class 1000) cleanroom housing most of our equipment for Plasma etch, Photolithography, Wet Chemical, Metallisation, Furnace, Characterisation and Electron Beam Lithography processes.
The LCN currently has two Bruker CellHesion 200 AFM systems primarily for measuring cell to cell or cell to substrate interactions. It can also quantify cell elasticity and response to mechanical stress.
The Bruker Nanowizard 4 combines fast scanning with high resolution at scan sizes up to 100um and is designed to provide mechanical and thermal stability on inverted optical microscopes for long term imaging.
An Everbeing EB-6 high precision probe station is available for DC wafer probing. Four low noise, high precision probes are available along with a microscope and digital camera. The EB-6 was donated to the LCN by Everbeing in January 2017.
The Bruker Dimension FastScan AFM allows imaging rates up to frames/second without sacrificing resolution from subnanometer to 100's of nanometers in height.
The LCN is equipped with two Bruker Nanowizard ULTRA Speed AFMs for fast scanning at up to 300Hz line rate in air and liquid at high resolution.
The LCN currently has three Bruker MultiMode 8 AFMs which are equipped with an E scanner or J scanner (with heater) and uses the unique PeakForce Tapping™ technology to provide new information, faster results and greatly improved ease of use.
This instrument is designed for rapid access to images for cleanroom samples with no sample prepartion. Samples can range from small pieces, up to 100mm wafers mounted on dedicated wafer holders. It has a LaB6 source and a resolution of 2nm.