Cleanroom, FIB and EBL Training

We offer appropriate training to long term users who want to use the Cleanroom facilities themselves.

We charge for equipment use and training.

For those of you who wish to use the Cleanroom equipment for only a few hours, we may be able to offer Service Work - please contact Steve Etienne or Suguo Huo.

Training Dates

The date of the next Cleanroom Induction and dates of Equipment Training sessions are available from here.(UCL login Required)

Cleanroom Access & Training Procedure

1) Plan ahead, because it can take some weeks to go through the process, and you need to have your supervisor's approval.

2) Apply for LCN Visitor status and LCN Building Induction, using this Webform.  Your attendance on an LCN Building Induction session will be confirmed by Denise Ottley. These are held regularly and consist of online tasks, a live TEAMS meeting and Video building Tour.  At completion you will be given access to the LCN building office spaces. If you are external you will be entitled to a Visitor Card valid for 12 months and UCL computing credentials. Cards can be collected from UCL Access Control with proof of identity.

3) While working during COVID there are additional LCN requirements to do which must be completed to get a Passport for LCN Building access.

4) Our Cleanroom Booking and Management system is called  PPMS, found at https://ppms.eu/london-nano/login.  Login requires your UCL credentials.  In PPMS follow the account creation process if necessary.

5) Once you are an approved User, request and complete PPMS Training (below)

6) Transfer funds to top up your Cleanroom Credit Using the procedure on the Cleanroom Payments page

7) Start booking equipment to use in the Cleanroom and accumulate experience. You need to be under supervision at this time and cannot access the Cleanroom on your own. 

8) Complete a Permit to Access Controlled Areas form when you have gained sufficient experience to apply for card access to the different spaces as below. The relevant Lab manager must be satisfied that you have demonstrated competence using the cleanroom and equipment in each space.

             8.1) Level 1 Cleanroom requires 20 hours booking, and approval by Steve Etienne

             8.2) FIB Lab requires Suguo Huo to approve your experience.

PPMS Training

In PPMS you must request a training, then select a form appropriate to the training you want. The form allows you to expand on your request.  Staff will approve your request and set up the training.

1) Cleanroom Induction Training:

Cleanroom Induction sessions occur every month, which consists of online reading and sign off of Cleanroom Risk Assesments, a live TEAMS meeting and a video Cleanroom safety tour.  A prerequisite is that you have completed the LCN Building Induction. (Free of Charge).

2) Cleanroom Working under COVID:

This online training provides information about the precautions to follow during COVID. This is required before access to lab is allowed. Prerequisite is Cleanroom induction Training. (Free of Charge)

3) Equipment Training:

In the Equipment Training Request Form identify what tools you will use and provide further details as necessary.  Training will be provided by Cleanroom staff or nominated experts.  Cleanroom Training sessions are physical on site meetings. Prerequisites are Cleanroom Induction Training and Cleanroom Working under COVID.

Contact the Process Engineer VJ for any questions about the following training:

  • Photolithography Training (Spin coaters, MJB3 and Quintel aligners) - 3 hours
  • Characterisation & RTP Training (DektakXT, Ellipsometer, Four Point Probe, microscope and RTP) - 3 hours
  • Plasma Equipment Training (PECVD, DRIE, SRIE, Oxford RIE and plasma ashers) - 3 hours
  • Chemical Process Training (Cleaning, wet etching, HF acid use) - 3 hours
  • Thermal Evaporation tools (Thermal and electron beam evaporators) - 3 hours
  • Sputtering Tools Training (PVD75 and SVS6000) - 3 hours
  • Back End Lab Training (Dicing saw, scribers, wire bonders, probe station) - 3 hours
  • HeidelBerg Direct Write Lithography.  - 3 hours

Contact the Equipment Manager Suguo Huo for any questions about the following training:

  • Electron Beam Lithography Training (Raith 150 Two) - 8 hours over two days,
  • Electron Beam Lithography Training (Elionix G100) - 8 hours over two days,
  • Focused Helium/Neon Ion Beam Training (Zeiss Orion)- 3 hours over half day.
  • Scanning Electron Microscope Training (Zeiss Crossbeam) - 3 hours over half a day.

Under COVID we can only train 2 people at one time - we will not arrange training for less than this number. 

When your training is validated, you will be enabled to book the equipment.

If you want to have ad-hoc or personal training, then an additional charge to cover the trainer's time will be added. This will more than double the cost for a training session,

Training Status

Novice User:     This person has no experience of the equipment and may only operate it under the direct supervision of a Super User. They are not able to book the equipment themselves..

Autonomous User:   This person can book and use equipment for established procedures within the guidelines laid out in the Standard Operating Procedures (SOP).  They shall not modify the equipment, or introduce new  procedures to it. You will become an Autonomous User after a training is validated by Staff.

SuperUser: This person is an expert in the equipment. They can train people in its use can configure the equipment and introduce new procedures to it.  They will create SOP's for the machine.  These people are most likely to be the technical team or certain nominated long term users.

All of your training will be recorded in PPMS.  For training done before January 2021, records are kept by Staff and can be provided on request.

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