Edwards A500 Electron Beam Evaporator
Edwards A306 Box Chamber Thermal Evaporator, 6" wafer capacity
- with 4 thermal sources
Edwards A306 Bell Jar Thermal Evaporator
- with 4 thermal sources (Cr, Au & Au alloys only)
Edwards E306A Bell Jar Thermal Evaporator
- with 4 thermal sources
- Metals available include Cr, Au, Ag, Ni, Al, Ti, Sn & Ge