SVS Sputter System

9th January 2013
SVS
Equipment manager:
Steve Etienne
Equipment manufacturer:
Speciality Vacuum Systems
Equipment model:
6000
Equipment technique:
Thin Film deposition
Deputy equipment manager:
Nick Constantino
Equipment Location:
Cleanroom Tunnel 3 - LCN Bloomsbury
Maintenance

Start Up and Shut down: Download

Software Manual: Download

SVS Sputter,

Four x 2” sources

Ion Gun System for sample cleaning

Max sample size 3”

Metals include Nb, Au

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