Optical Photoresist Coating

Optical resist coating station
Equipment manager:
Steve Etienne
Equipment technique:
Deputy equipment manager:
Suguo Huo

Spin Coater with chucks for samples from 3x3mm up 150mm diameter, Dehydration oven and two hotplates are located in Bench 1.  This set up is for spin coating all materials that are exposed using Ultra-Violet light.