Karl Suss small Mask Aligner

Suss mask aligner
Equipment manager:
Steve Etienne
Equipment manufacturer:
Karl Suss
Equipment model:
Equipment technique:
Deputy equipment manager:
Dave Malone

Karl Suss MJB3 Mask Aligner for small and delicate substrates.

UV 300 Optics for 365nm photoresists

Samples of all shapes from 4mm square up to 3" diamater

Masks from 2" square up to max 4" square 0.060" thick

Soft and hard contact modes