Four Point Probe

Image of Four point Probe
Equipment manager:
Suguo Huo
Equipment manufacturer:
Equipment model:
Equipment technique:
Deputy equipment manager:
Steve Etienne

This is the FFP5000 model of probe equipped with an external probe and sample holder.  The stage is capable of accepting wafers up to 100mm diameter and has indexed locations to permit reproducable positioning.

Automatic measurement of Ohms/square or V/I values. Thickness and resistivity of materials can be calculated after entering resistivity and thickness..

Minimum sample size is 25mm.