Edwards E306 Belljar Evaporator

E306 Diff pump
Equipment manager:
Steve Etienne
Equipment manufacturer:
Edwards
Equipment model:
E306 Diffusion pump
Equipment technique:
Deputy equipment manager:
Suguo Huo

This equipment has  diffusion High vacuum pump and oil rotary backing pump.  It has a rotary source holder allowing up to 4 different materials to be deposited in sequence in the same vacuum cycle, and has a thickness monitor.  Operation is entrely manual.

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