Equipment manager
Steve Etienne
Equipment manufacturer
Edwards
Equipment model
E306 Evaporator
Equipment technique
Deputy equipment manager
Suguo Huo
Equipment Location
This equipment has had the vacuum system upgraded to a turbo-molecular high vacuum pump and scroll backing pump. It has a rotary source holder allowing up to 4 different metals to be deposited in sequence in the same vacuum cycle.
A thickness monitor is fitted to show live readout of deposited metal thickness. Operation of the shutter and vacuum valves is entirely manual.