Equipment manager
Steve Etienne
Equipment manufacturer
Edwards
Equipment model
A308 FL400
Equipment technique
Deputy equipment manager
Suguo Huo
Equipment Location
This equipment has four independent source positions allowing multiple layers to be deposited without breaking vacuum. The maximum sample size is 200mm diameter, or multiple smaller pieces.
It is equipped with an Endpoint detector and automatic power control. Pumping is by a scroll pump backed Turbo pump.