Edwards A306 Box Evaporator

A306 Metal Box
Equipment manager:
Steve Etienne
Equipment manufacturer:
Edwards
Equipment model:
A308 FL400
Equipment technique:
Deputy equipment manager:
Suguo Huo

This equipment has four independent source positions allowing multiple layers to be deposited without breaking vacuum.  The maximum sample size is 200mm diameter, or multiple smaller pieces.

It is equipped with an Endpoint detector and automatic power control.  Pumping is by a scroll pump backed Turbo pump.

CLOSE X