Carl Zeiss Orion NanoFab

Orion NanoFab
Equipment manager
Suguo HUO
Equipment manufacturer
Carl Zeiss
Equipment model
Orion NanoFab
Equipment technique
Equipment Location

Carl Zeiss ORION NanoFab -

A Multibeam Ion (Helium & Neon) Microscope for Sub-10nm Nanostructuring


Main Features:

  • Fast machining of sub-10 nm structures: Milling and GIS Deposition
  • Two beams in one instrument: Helium and Neon
  • High resolution imaging: 0.5 nm image resolution
  • Nanopatterning Engineering (NVPE):  features the NanoPatterning and Visualization Engine - an integrated hardware and software control system.