Carl Zeiss ORION NanoFab -
A Multibeam Ion (Helium & Neon) Microscope for Sub-10nm Nanostructuring
Fast machining of sub-10 nm structures: Milling and GIS Deposition
Two beams in one instrument: Helium and Neon
High resolution imaging: 0.5 nm image resolution
Nanopatterning Engineering (NVPE): features the NanoPatterning and Visualization Engine - an integrated hardware and software control system.