The ISO Class 6 Cleanroom Facilities located on level 1 of LCN are undergoing a major refurbishment to allow the installation of the following major items of equipment:
- ISO Class 5 Room with extremely stable temperature control for EBL
- Elionix ELS G-100-8 100kV Electron Beam Lithography tool
- Heidelberg DWL66+ Laser Direct Write Optical Lithography tool
- Tystar 4600 4 tube furnace stack for Wet and Dry Oxide growth, diffusion & annealling
- OMNI VRTP 200 Rapid Thermal Process tool.
To allow works to go ahead, the entire Level 1 is closed for refurbishment, and no equipment in this space is available for use or for training.
However, the facilities in our Back End Lab (level 2) and SEM/FIB lab ( level B2) are still available for use during this time. We will be running a reduced program of induction and training whose details can be found on the Training page.
We expect the cleanroom to reopen in stages from Mid September 2018.
Steve Etienne, Cleanroom Manager, 18 June 2018
The LCN offers access to a wide range of cutting-edge scientific equipment at two of the UK's leading academic institutions, UCL and Imperial College London. LCN researchers are experts in modelling, design, fabrication and characterisation on the nano-scale.
Research services in central London
The LCN Bloomsbury site has 255 m2 of ISO 14644-1 Class 6 (Class 1000) cleanroom housing the majority of the equipment including Electron Beam Lithography and a facility which houses three Focused Ion Beam (FIB) lithography tools. There is also a Back End Laboratory for processes such as sawing, scribing & wirebonding. Cleanroom space and equipment is available to hire to external academic and insdustrial users.
In addition to basic equipment training, we also offer specialist training, such as our accredited Bruker Atomic Force Microscopy course.
For more information please browse the left-hand menu or contact us.