LCN Cleanroom Facility

Electron Beam Lithography Equipment in Cleanroom

The Cleanroom at LCN on the Bloomsbury site has 255 square metres of ISO 14644-1 Class 6 (Class 1000) cleanroom housing most of our equipment for Plasma etch, Photolithography, Wet Chemical, Metallisation, Furnace, Characterisation and Electron Beam Lithography processes. There are separate spaces which house three Focused Ion Beam (FIB) tools, and a Back-End Laboratory for processes such as sawing, scribing & wire bonding.

To Browse though our equipment and capabilities look further on these Equipment pages.

The Cleanroom is an Open Access facility, offering equipment and services to external academic and industrial users as well as LCN researchers. We welcome individuals who will enrol and train to operate the equipment themselves. Look to  Enrolment and Training details if you want to enrol as a user.

For Cleanroom enrolled users, booking and management of your cleanroom activities is controlled by the PPMS booking system.  Look to the Cleanroom WIKI for Training information, Standard Operating Procedures and Video Guides.  UCL login credentials are required.

COVID Precautions: 

The Cleanroom at LCN is open and available to use, and in line with Government and UCL advice.  Specific details can be found at these links:

LCN Building Reopening and Access