Equipment manager
Vijay Krishnan
Equipment manufacturer
Heidelberg
Equipment model
DWL 66+
Equipment technique
Deputy equipment manager
Steve Etienne
Equipment Location
The Heidelberg direct writer features
- laser wavelength 375nm, 70mW.
- micro and macro cameras in the front and back of sample.
- filtered flow box contains internal heating system- temperature stable at +/-0.1deg C. T set at 22.7deg C (doors closed).
- air levelled granite table (against vibrations)
- positioning interferometer accuracy: 10 nm
- two write heads:
|
Write head |
2 mm |
10 mm |
|
Smallest feature (nm) |
400-600 |
950-1000 |
|
Speed |
5mm2/sec |
20x faster than 2mm write head |