This instrument is a single wavelength automatic Ellipsometer. It is used to measure thin transparent films on Silicon such as Silicon Oxide, and Silicon Nitride.
It calculates both Refractive Index and Thickness of the film, and will accurately calculate Delta and Psi angles.
Wavelength: 632.8 nm
Delta: 0.1 degrees
Psi: 0.05 degrees
Measuring Time: 60 sec maximum
Sample size: Up to 150 mm diameter