Rudolph Auto Ellipsometer

Equipment

Overview

This instrument is a single wavelength automatic Ellipsometer. It is used to measure thin transparent films on Silicon such as Silicon Oxide, and Silicon Nitride.

It calculates both Refractive Index and Thickness of the film, and will accurately calculate Delta and Psi angles.

Wavelength: 632.8 nm

Resolution

Delta: 0.1 degrees

Psi: 0.05 degrees

Measuring Time: 60 sec maximum

Sample size: Up to 150 mm diameter 

Technique: