Rapid Thermal Processor (RTP)

Equipment

Overview
Solaris 150

The SSI Inc Solaris 150 Rapid Thermal Processing System (RTP) is a proven, “state of the art” versatile tool for Silicide formation, metal Alloys Group III Nitrides Reflow: BPSG, PSG contact anneal, Ferroelectrics, Implant anneal, HBT & MESFET Solar Cells, Implant monitoring Thermal donor, Si-Ge and LEDs.

The Solaris 150 is a manually loaded Rapid Thermal Processing System. Capable of processing silicon, III-V and other substrates up to 150mm diameter. The maximum temperature of operation is 1100 C.

The Solaris 150 is equipped with recipe management, system diagnostics, and user-friendly interface for operator productivity.

Technique: