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SEM/FIB Lab

About the instrument
The Carl Zeiss XB1540 “Cross-Beam” focussed-ion-beam microscope at London Centre for Nanotechnology in University College London is a unique instrument in a unique location. The instrument is equipped not only with an in situ field-emission scanning electron microscope for gallium-free imaging, but also an in situ low-voltage argon-ion-miller for gallium-free nanofabrication. The instrument is located in a brand new purpose-built class 10,000 cleanroom in the basement level of the London Centre for Nanotechnology.

Access to the instrument
The SEM/FIB is available for use by researchers outside of the LCN, please select the correct category for information on access:

  • Researchers from University College London or Imperial College
    please use the booking sheet to check availability and follow instructions therein.
  • Researchers from other UK Higher Education institutions
    You may apply for time on this instrument under the EPSRC Access programme.
  • Other users
    Please email Dr Paul Warburton (p.warburtonee.ucl.ac.uk) with an outline of your project and request a quote.

Technical specifications and key features

  • Ultra high resolution FESEM with unique GEMINI column
  • High performance CANION FIB column
  • CrossBeam® operation: high resolution live imaging during milling and polishing
  • Optional multi-channel gas injection system for material deposition and enhanced or selective etching
  • Image archiving, networking and hardcopy solutions from the integral Windows® operating system

  SEM FIB
Resolution 1.1 nm @ 20 kV 7 nm @ 30 kV guaranteed,
  2.5 nm @ 1 kV 5 nm achievable
Magnification 20x - 900kx 600x - 500kx
Probe Current 4 pA - 20 nA 1 pA - 50 nA
Acceleration Voltage 0.1 - 30 kV 3 - 30 kV
Emitter Thermal field emission type Ga liquid metal ion source
    (LMIS)