SEM/FIB Lab
About the instrument
The Carl Zeiss XB1540 “Cross-Beam” focussed-ion-beam microscope at London Centre for Nanotechnology in University College London is a unique instrument in a unique location. The instrument is equipped not only with an in situ field-emission scanning electron microscope for gallium-free imaging, but also an in situ low-voltage argon-ion-miller for gallium-free nanofabrication. The instrument is located in a brand new purpose-built class 10,000 cleanroom in the basement level of the London Centre for Nanotechnology.
Access to the instrument
The SEM/FIB is available for use by researchers outside of the LCN, please select the correct category for information on access:
- Researchers from University College London or Imperial College
please use the booking sheet to check availability and follow instructions therein.
- Researchers from other UK Higher Education institutions
You may apply for time on this instrument under the EPSRC Access programme.
- Other users
Please email Dr Paul Warburton (p.warburton ee.ucl.ac.uk) with an outline of your project and request a quote.
Technical specifications and key features
- Ultra high resolution FESEM with unique GEMINI column
- High performance CANION FIB column
- CrossBeam® operation: high resolution live imaging during milling and polishing
- Optional multi-channel gas injection system for material deposition and enhanced or selective etching
- Image archiving, networking and hardcopy solutions from the integral Windows® operating system
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SEM |
FIB |
| Resolution |
1.1 nm @ 20 kV |
7 nm @ 30 kV guaranteed, |
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2.5 nm @ 1 kV |
5 nm achievable |
| Magnification |
20x - 900kx |
600x - 500kx |
| Probe Current |
4 pA - 20 nA |
1 pA - 50 nA |
| Acceleration Voltage |
0.1 - 30 kV |
3 - 30 kV |
| Emitter |
Thermal field emission type |
Ga liquid metal ion source |
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(LMIS) |
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