Tunnel 1Tunnel 1 houses the plasma tools. These tools are used for Reactive ion etching of iiiv materials and for deep silicon etching. The tools can also be used to deposit insulating materials such as Silicon Oxide.
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Tunnel 1Tunnel 1 houses the plasma tools. These tools are used for Reactive ion etching of iiiv materials and for deep silicon etching. The tools can also be used to deposit insulating materials such as Silicon Oxide.
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