Javascript control for large font size Javascript control for very large font size
The LCN Logo - link to home page
A section image

Clean Room Status

Below is a list of the Clean Rooms current facilities and their status.

Users should check this page regularly to check the status of the various areas and equipment installed in the Clean Room.

Unavailable
commissioning
Maintenance
In Service

Tunnel
Category
Equipment
Status
2
Chemical
 Wet bench 1 - Spinners, Hot plates & oven
In Service
2
Chemical
 Wet bench 2 - Developing & Solvents
In Service
2
Chemical
 Wet bench 3 - Etching & Acids
In Service
2
Chemical
 Fume Hood 1 - Piranha & RCA
In Service
2
Chemical
 Fume Hood 2 - HF acid only
In Service
2
Chemical
 Fume Hood 3 - Special Purposes
In Service
2
Lithography
 Karl Suss MJB3 mask aligner
In Service
2
Lithography
 Quintel 4000-6 mask aligner In Service
2
Characterisation
 Dektak8 Surface profiler
In Service
3
Characterisation
 Alpha Step 200 - Surface profiler
In Service
3
Characterisation
 Stereo microscope
In Service
2
Characterisation
 Microscope & camera
In Service
3
Characterisation
 Vickers Image Shearing Microscope
In Service
3
Characterisation
 Vickers IR polarising Microscope
In Service
3
Characterisation
 Perkin Elmer System ONE FTIR
In Service
3
Characterisation
 Horiba Ellipsometer
In Service
3
Characterisation
 Veeco FFP5000 Four Point Probe
In Service
1
Process
 BOC Edwards E306 Evaporator-Bell jar
In Service
3
Process
 BOC Edwards Auto306 Evaporator-Metal chamber
In Service
3
Process
 BOC Edwards Auto306 Evaporator-Bell jar
In Service
3
Process
 BOC Edwards Auto500 eBeam + Thermal source
In Service
3
Process
 HiTech Furnace-hot wall furnace up to 4" wafer
In Service
1
Assembly
 TWI Anodic bonder
In Service
1
Process
 STS PECVD
In Service
1
Process
 STS ASE- Deep silicon etcher
In Service
1
Process
 STS ICP shallow etcher with LEP 300
In Service
1
Process
 OPT RIE
In Service
Level 2
Room 2.02
Assembly
 DISCO DAD 3230 Dicing Saw
In Service
Room 2.02
Assembly
 Karl SUSS RA120 Scriber
In Service
Room 2.02
Assembly
 K&S 4123 Wedge bonder
In Service
Room 2.02
Assembly
 K&S 4523 Ribbon bonder
In Service