Clean Room Training

LCN cleanroom training for 2008.

All users who require access to the cleanroom must attend specific training sessions. Some of these sessions will be charged for. Please read through the session descriptions below  before booking a course.

Booking  training sessions
If you want to attend any of these sessions  you will need approval from your supervisor or PI first. Fill in the Booking Form and send it via email to lcn-support@ee.ucl.ac.uk. This form can also be used to register you interest in training that you would like offered, not described below.

Courses with a fee will also require payment in the form of an IDT (UCL) or purchase order (others) sent directly to the cleanroom support team in room 2.C6.

1. CLEANROOM INDUCTION and ACCESS  £75:00 (attendance is compulsory for cleanroom access)
It is essential for any user to attend this session once and pass a set of tests before unaccompanied access to the cleanroom is allowed. If you have already attended this session and passed the test you do not need to attend again.

NEXT SESSION: Friday 17 October,13:30,  in LCN 5th Floor Visualisation Suite, 

EQUIPMENT Training: These are training sessions (mainly demonstrations) for commonly used equipment.

2. Height and Width Characterisation (attendance is highly recommended )
This is an introductory level course. Any user wishing to process planar/substrate samples should attend. This session, focusing on basic characterisation techniques, includes optical microscope with camera, alpha-step (surface profiler), Dektak (surface profiler), & ellipsometry.

3. Use of  wet chemical benches for small & irregular substrates, (<1 inch in size).
Any user wishing to fabricate planar devices should attend this session which includes basic techniques such as solvent cleaning, piranha cleaning, rinsing and drying.

4. Photolithography for small & irregular substrates (<1 inch in size).
Will demonstrate how to define patterns onto a using a photoresist process. Equipment used include spinners, mask aligner and wet benches.

5. Thin film coating by physical vapour deposition.

An overview of thin film metal coating using a thermal evaporator.  LCN's range of thermal and electron beam evaporators will be described.

NOTE Users of  wafers larger than 2 inches should ask the cleanroom team for a separate training session as handling

methods and tools are different to small substrates.

Special Requests are invited for training in small groups for any cleanroom equipment. Please contact the cleanroom team for advice and information about any fabrication processes you may require by using the Booking Form. Examples are:

SU-8 process, 4 inch wafer processing, Anisotropic Etching, Plasma Etching, Advanced Silicon Etch, Plasma Deposition, Furnaces, wafer bonding, wafer dicing, wire bonding, etc