The Centre's Clean Room (rated as Class 100 to Class 1000) and service areas occupy the entire first floor, 17m by 20m.
This is an environmentally controlled area in which dust and other air-borne contaminates are minimised.The ultra-clean conditions that are maintained allow precision fabrication and characterisation of nanostructured devices. The clean room is split up into 3 tunnels, as show below. Tunnel 1 is the main location for the plasma tools etc. Tunnel 2 is where the photolithography is carried out. In this area are the mask aligners, Surface profilers, wet benches and fume hoods. Situated in tunnel 3 are furnaces for annealing, microscopes, elipsometers plus Edwards evaporators including ebeam and an Ion Etch & Sputtering unit .
