Focused Ion Beam Microscopy (FIB)

Carl Zeiss Focused Ion Beam Microscope

Technical specifications and key features

  • Ultra high resolution FESEM with unique GEMINI column
  • High performance CANION FIB column
  • CrossBeam® operation: high resolution live imaging during milling and polishing
  • Optional multi-channel gas injection system for material deposition and enhanced or selective etching
  • Image archiving, networking and hardcopy solutions from the integral Windows® operating system
  SEM FIB
Resolution 1.1 nm @ 20 kV 7 nm @ 30 kV guaranteed,
  2.5 nm @ 1 kV 5 nm achievable
Magnification 20x - 900kx 600x - 500kx
Probe Current 4 pA - 20 nA 1 pA - 50 nA
Acceleration Voltage 0.1 - 30 kV 3 - 30 kV
Emitter Thermal field emission type Ga liquid metal ion source (LMIS)