Characterisation

Carl Zeiss EVO MA10 SEM, with LaB6 source,  samples up to 4" wafer

• 2nm resolution
• High Vac & Environmental modes

Bruker DektakXT surface profiler, samples up to 8” diameter, thickness up to 35mm

• 5nm vertical resolution
• 2D and 3D profiles, stress measurement
• Fully motorised X,Y and Theta stage for automated wafer mapping

Carl Zeiss Axioskop Microscope & Camera,

• Reflection/Transmission; DIC, Dark & Light field
• Image Capture and processing software

Ambios Q View AFM / Interferometer
Horiba MM-16 Spectroscopic Ellipsometer, XY mapping stage, multilayer films
Perkin Elmer System ONE FTIR
Vickers Image Shearing microscope, feature size measurement to 0.5 µm
 Nikon Stereo Microscope
Veeco FFP5000 four point probe
Alpha Step 200 surface profiler
Recording Thermocouple reader