Characterisation (techniques available in the cleanroom)

Carl Zeiss EVO MA10 SEM
 
Carl Zeiss Axioskop Microscope & Camera

 
Bruker DektakXT surface profiler, samples up to 8” diameter, thickness up to 35mm

• 5nm vertical resolution
• 2D and 3D profiles, stress measurement
• Fully motorised X,Y and Theta stage for automated wafer mapping

 
Ambios Q View AFM / Interferometer
Horiba MM-16 Spectroscopic Ellipsometer, XY mapping stage, multilayer films
Perkin Elmer System ONE FTIR
Vickers Image Shearing microscope, feature size measurement to 0.5 µm
 Nikon Stereo Microscope
Veeco FFP5000 four point probe
Alpha Step 200 surface profiler
Recording Thermocouple reader